Production tax credits for hydrogen production and critical minerals processing all but passed parliament after the government struck a deal with the Greens on the incentives.
The minor party also pushed for further amendments that would ensure beneficiaries of the subsidies would publicly report on whether they were meeting community benefit principles - which require them to promote safe jobs, develop workforces and achieve positive outcomes for local communities - and undergo mandatory consultation processes for projects on First Nations land.
These changes were voted down and while Greens Senator Nick McKim said the party would like to have done more, the decision to push on with the uranium amendment was necessary to try prevent Opposition Leader Peter Dutton's plan to build seven nuclear reactors.
"The Greens amendment that did pass was Dutton-proofing the Future Made in Australia legislation," he told reporters in Canberra on Tuesday.
"We showed that we're absolutely able to use our balance of power in the Senate to deliver outcomes that will make it far more difficult for Mr Dutton - should he end up at The Lodge - to go about with his nuclear agenda."
Shadow treasurer Angus Taylor has said the incentives were being "tied down in red and green tape" and claimed they were "more about the social objectives of Labor and the Greens, not economic objectives".
The subsidies form part of the federal government's $22.7 billion Future Made in Australia manufacturing policy, which aims to fund clean energy projects and create jobs for the decarbonisation transition.
"This is all about strengthening our economy and our industrial base by making it easier to maximise the opportunities that come from cleaner and cheaper energy," Treasurer Jim Chalmers said.
The laws passed the Senate in a late-night sitting on Monday and will now be sent back to the lower house to be rubber stamped.
Hydrogen producers will get a tax incentive of $2 per kilogram of renewable hydrogen produced between 2027/28 and 2039/40, while critical minerals producers will get 10 per cent of processing and refining costs.
The Business Council of Australia welcomed the laws passing the Senate but warned they "must not be so restrictive or onerous as to undermine their success."
ACTU president Michele O'Neil said the scheme would help deliver thousands of new jobs, particularly in the regions, while Australian Workers' Union national secretary Paul Farrow said the measures would unlock Australia's potential move beyond raw exports and build up domestic processing and manufacturing capabilities.
The legislation has also been lauded by the industry with Fortescue Metals chief executive Dino Otranto noting it was a "critical step" building a green iron metal industry.
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